SNE-4500M

High Resolution Tabletop-SEM

The high resolving power allows real-time specimen inspection up to 100,000x. Obtaining high quality images of extremely small features or particles is made possible by utilizing the standard Variable Aperture(30, 50, 100㎛) and optimal sample positioning with omnidirectional control of 5 axis stage.

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High Resolution Tabletop-SEM

The high resolving power allows real-time specimen inspection up to 100,000x. Obtaining high quality images of extremely small features or particles is made possible by utilizing the standard Variable Aperture(30, 50, 100㎛) and optimal sample positioning with omnidirectional control of 5 axis stage.

 

Model SNE-4500M Plus(B)
Resolution 5nm
Magnification 150,000x
Detector SE/BSE
Vacuum High/Low
Stage X, Y, R, Z, T : Fully Motorized
 

Stage Traverse

 

X, Y : 40㎜ R : 360º

Z : 0 ~ 40㎜ T : -45 ~ 90º

 

Max. Sample Size

 

80㎜(D) / 50㎜(H)

 

CCD Camera

 

Top-View CCD Camera

 

O.L Aperture Type

 

30, 50, 50, 100㎛(Variable Type)

 

Electron Beam Source

 

Pre-centered Tungsten Filament Cartridge

 

Acceleration Voltage

 

1㎸ ~ 30㎸ (1/ 5/ 10/ 15/ 20/ 30) – 6 Step

 

Display Mode

 

320 x 240 / 640 x 480 / 1,280 x 960 / 2,560 x 1,920 / 5,120 x 3,840

 

Automation Function

 

Start, Focus, Stigmator, Contrast & Brightness

 

Image Format

 

BMP, JPEG, PNG, TIFF

 

Vacuum Pump

 

Rotary + Turbo Molecular Pump (Fully Automation System)