EDS

Energy Dispersive Spectroscopy

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EDS

Energy Dispersive Spectroscopy(EDS) is optionally for analyzing sample composition. EDS is used for qualitative and quantitative elemental analysis by detecting characteristic X-rays generated as a result of the electron beam excitation of the atmic structure. EDS Detectors can be installed on all SEC SEM models and are available with both compact, simplified EDS software or more advanced spectroscopy solutions, all from well known industry standard EDS suppliers.

 

 

 

Model X Flash Series  

Element

 

Brand
 

Detector Type

 

Silicon Drift Detector (SDD)

 

Ultra-thin Silicon Nitride (Si3N4) Window

 

Energy Resolution

 

Mn ka ≤ 129 eV

 

Detector Active Area

 

30㎟

 

25㎟

 

Detection Range

 

Boron(5) ~ Americium(95)

 

X-ray Throughput

 

> 150,000 cps

 

> 100,000 cps